SHANGHAI TECHINITAL MATERIALS CO.,LTD

Ion implantation source of tungsten and molybdenum parts

Techinital provides high quality, precision machined molybdenum and tungsten components for processing equipment used in the manufacture of semiconductors, including Ion Implantation, MOCVD, CVD, PVD.

Ours manufacturing experience, expertise, and knowledge of the molybdenum and tungsten materials enable us to provide precision machined components that meet your specifications.  

We supply tungsten, molybdenum, titanium and advanced ceramic components and spare parts for ion implanter in OEM quality.

Our main products including cathode, arc chamber, repeller, side/end plate and fastener in ion source of axcelis and varian implanter worked in production processing of 12" and 16" wafer. 

High quality consumable parts required in the semiconductor production of etching, PVD, CVD

We supply high quality consumable parts required in the production of etching process in semiconductor, including quartz, silicon and ceramic products. And we work as second source of spare parts for following OEM's parts.

1. AMAT 2. LAM 3. TEL
Our company offers different raw material options of the finished parts we manufactured.

Quartz  1. Heraeus 2. Momentive 3. Feilihua (made in china)

Alumina (Al2O3)

Silicon  1. Single Crystal 2. Polycrystalline.

We don't make these materials but rather process them into something more valuable through our precision machining capabilities. This allows us to be unbiased when it comes to making recommendations as to what material is best suited for a specific application.

Electron Beam Gun/Emitter Assy and spare parts for Temescal and Telemark

E-Beam Gun/Emitter Assembly and its spares, consumables and accessories

Our company offers OEM quality Electron Beam Gun for full range of Electron Beam Evaporators in all Kind of Deposition.

We have electron beam gun replacement parts for your Multiple and Single Pocket and High Performance Emitters.

We manufacture filaments, crucibles, feed thrus,electromagnetic coil, gun parts, insulators,and all metal parts for all popular electron beam systems including: 

Temescal, Telemark,ULVAC,Thermionics,Satisloh, MeiVac, Sloan, and Leybold.

Techinital provides E-Beam crucibles (PVD consumables) which are available in a variety of materials;
Boron Nitride, Copper Cu, Graphite, Molybdenum, Tantalum, Tungsten, Aluminum Oxide 

Products for semiconductor manufacturing

TECHINITAL produces spare parts and consumables made by a series of materials including tungsten,molybdenum,tantalum,graphite,ceramic,quartz,sapphire and other apporved materials for semiconductor manufacturing equipment from many OEMs used in different process sections.

Our company is currently supplying these manufactures' parts.

APPLIED MATERIALS / VARIAN

AXCELIS

LAM / NOVELLUS

TEL

TELEMARK

Customized Components

We also offer custom engineering services to your particular production needs and parts design that boost equipment performance and reliability for cost-down.

Email: 13917175219@139.com

Performance Materials to Precision Products

in processing equipment of Manufacture for

Semiconductor