SHANGHAI TECHINITAL MATERIALS CO.,LTD

 

We supply tungsten, molybdenum, titanium and stainless steel components and spare parts for ion implanter in OEM quality.

Our main products including cathode, arc chamber, repeller, side/end plate and fastener in ion source of axcelis and varian implanter worked in production processing of 12" and 16" wafer.

 

Our OEM quality of Ion Implant Source replacement components including but not limited to

 

AIBT: istar

 

Applied Materials: 9000, 9200, 9200xR, 9500, 9500xR, Quantum, Quantum I, Quantum II, Quantum III, Quantum X, Quantum X+, Quantum xR, xR, xR/Leap, xR120, xR200, xR80

 

Varian Semiconductor Equipment (now Applied Materials): VIISta Trident, PLAD, VIISta HCS, VIISta HCP +/I, VIISta 80, E1000, VIISion 200, VIISion 200+, VIISion 80+, VIISta HC, 120-10, 120XP, 160XP, 180XP, 80XP, VIISta 3000, Genus, Kestrel, VIISta 810 XE/XER, VIISta 900 XPT, VIISion, E220, E500, VIISta 810, VIISta 810 XE, VIISta 900, VIISta 900XP, 300D, 300XP, 350D

 

Axcelis: GSD HC (200/200E/200E2), HC3, Ultra, Eterna, GSD 100, GSD 160A, GSD 200E, GSD 200E^2, GSD HC, GSD HC3, GSD III, GSD III LE, GSD LED, NV GSD, NV 10-160, NV 10-180, NV 10-80, Optima HD, ULE, Ultra, GSD HE, GSD VHE, GSD HE, GSD HE3, GSD VHE, Optima XE, Paradigm XE, NV 3206/3204, NV 6200, NV 8200, NV 8250, Optima MD

 

Nissin: NH80, PR80, Exceed 3000, CLARIS, EXCEED2000A/2000AH, EXCEED2300AV, EXCEED3000AH, EXCEED9600A, NH20, NH45

 

SEN: NV-GSD-160A, NV-GSD-80A, NV-GSDIII, NV-GSDIII-180, SD, NV-GSDIII-90E, NV-GSDIII-LE, NV-GSDIII-LE, V-GSD-HC, LEX, LEX3, SHX, NV-GSD-HE, NV-GSD-HE3, MC3MC3-II, NV-MC3

 

Ulvac: IH-860, IDZ-7000, IDZ-8001, IDZ-9001, IM-200, IW-630 

 

Please provide us OEM NUMBER or your drawings, We will work out quotation to you soon.

 

Techinital also offers enhancements, modifications, or alternatives to standard OEM spare parts as per custom drawings from clients.

For more information,please email us at 13917175219@139.com

 

 

 

Products List and OEM numbers

Email: 13917175219@139.com

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Performance Materials to Precision Products

in processing equipment of Manufacture for

Semiconductor

About Techinital

 

We are committed to the optimization of the machining process, the selection of the most appropriate machining equipment,

to ensure products accuracy at the same time, to provide best cost solution to the user.

We are committed to selecting the raw material with stable quality from our long term cooperated raw material mill,

as we know high proformance products depand high quality raw materials in the applications of refractory metal.

©2017 Techintial Materials

 

Contact Techinital

 

Factory: No.04-06, Building 3, XM Industrial Zone, Economy&Technology Development District, Guiyang City, Guizhou China

Office: Room 2030A-B, No.212, Road Jiangning, Shanghai China

Email: 13917175219@139.com

HP: +86 13917175219