VARIAN VIISION
Item Plansee No. Description OEM No
10 11631346 SIDE PLATE, W/GAS NOZZLE, BERNAS A/C E17094441
20 11371976 SIDE PLATE, BERNAS ARC CHAMBER E17067001
30 11372511 FILAMENT BERNAS ARC SOURCE E17069340
40 11632945 BASE PLATE, BERNAS A/C E17094421
50 11632049 VIISion ARC SLIT, FLAT LINER VERSION E17135630
60 11371968 End Plate, Bernas Arc Chamber E17124440
70 11632048 REFLECTOR, THREADED E17124430
80 11632052 INSULATOR, OUTER E17132320
90 11632051 BAFFLE, INNER INSULATOR E17132290
100 11632053 INSULATOR, INNER BERNAS E17132280
110 11602581 GRAPHITE INSERT E17121520
120 11632124 FILAMENT INSULATOR E17131210
130 11632123 INSULATOR, FILAMENT, BERNAS SOURCE E17092410
140 11632176 FILAMENT CLAMP E17092400
150 11632295 GAS FEED TUBE E17094401
160 11632699 RETAINER HOOK E17077001
170 11371982 VIISion ARC SLIT, CURVED LINER VERSION E17077055
180 11371995 Base Plate Bernas Arc Chamber E17094422
190 11371737 SUPPORT PLATE, ARC CHAMBER, LEFT E17089930
200 11371741 SUPPORT PLATE, ARC CHAMBER, CENTER E17089940
210 11371733 SUPPORT PLATE, ARC CHAMBER, RIGHT E17089931
AMAT VIISTA HIGH CURRENT
Item Plansee No. Description OEM No
10 11381782 INSULATOR, DUAL MOUNT, HC E17296280
20 11370768 ATHODE/REPELLER BAR, HC E17292520
30 11611389 Bar, Filament, Ver.2, IHC80 E17292530
40 11506845 CLAMP FILAMENT VER.2 IHC E17292540
50 11615457 CATHODE CLAMP, VHC E17331970
60 11821596 FILAMENT, PH1, W E17297920
70 11371690 NUT, 4-40, MO E17291350
80 11371686 SHCS, 4-40, .460LG, MO E17295210
90 11370757 NUTPLATE, BARCLAMP, HC/MC E17292510
100 11628287 SHCS, 6-32, .25LG, SST E47000016
110 11635252 SHCS, 6-32, .500LG, SST E47000018
120 11431983 CATHODE, STD, OP, HC E17295630
130 11372053 END PLATE, CATHODE, HC, W E17327340
140 11372068 LINER END, CATHODE, W E17292050
150 11372069 LINER, REPELLER, W E17292070
160 11372054 END PLATE, REPELLER, HC, W E17327330
170 11372070 LINER, SIDE, W E17292040
180 11372055 SIDE PLATE, HC, W E17327320
190 11372059 BASE PLATE, NON-VAP, HC, W E17327310
200 11372071 LINER BASE, HC, W E17292180
210 11506848 REPELLER CLAMP, HC E17292550
220 11372063 REPELLER, HC E17289910
230 11382739 BUSHING GAS, HC E17306220
240 11635116 GAS TUBE, HC E17336980
250 11635237 GAS FEED PLUG E17312370
340 11637494 FILAMENT CLAMP, PH1 PLANSEE DESIGN
350 11593400 SOURCE HOUSING,IHC SOURCE  
370 11933046 REPELLER MOD KIT  
AMAT QUANTUMI-X    
Item Plansee No. Description OEM No
10 11634075 SUPPORT ARM, G2, ADJ 002006241
20 11635624 RETAINER, HOOK 002190036
30 11633157 ELECTRODE, G2, ADJ. 002007388
40 11633335 FRONTPLATE L/H 650MM RAD 002190786
50 11560974 FRONTPLATE R/H 650MM RAD 002190787
60 11631957 LINER, END CATHODE 002089586
70 11159889 CATHODE SLOTTED 004047909
80 335000 SUPPORT BAR, CATHODE 004096352
90 332103 FILAMENT, ARC CHAMBER, IHC 002086735
100 11088138 FILAMENT GUIDE 002087508
110 11633256 CAM, FILAMENT CLAMP PLANSEE DESIGN
120 11631952 FILAMENT CLAMP, L/H 002086734
130 11633257 CAM RETAINER PLANSEE DESIGN
140 11631953 FILAMENT CLAMP, R/H 002086733
150 345837 LINER, SIDE, W 002086738
160 345844 LINER, BASE, W 002086737
170 11632160 ARC CHAMBER INDIRECT 002089990
180 11631660 PLUG, ARC CHAMBER, SDS 002085074
190 11381958 SLEEVE, OVEN NOZZLE 002081226
200 11631954 LINER, END ANTI-CATHODE 002086740
210 235781 ANTICATHODE 002081482
220 302705 SUPPORT BAR, ANTI-CATHODE 002080070
230 11633771 ARC CHAMBER, QUANTUM II 002021355
AXCELIS PARADIGM XE/HE3
Item Plansee No. Description OEM No
10 11370933 ARC SLIT, 20R, MO 17165580
20 11633273 REPELLER, NO HOLE, W PLANSEE DESIGN
30 11631976 INSULATOR, REPELLER 17121850
40 11631975 Mo INNER CUP SHIELD EGN-21750 17121750
50 346803 SCREW, 6-32 17121770
60 11370947 Arc Chamber 17133400
70 11631794 BODY, ARC CHAMBER (ELS) PLANSEE DESIGN
80 11631548 SPACER, SHOULDER SCREW 17128230
90 11631973 ROD, RETAINING TA 17036440
100 11631539 SPACER, RETAINING ROD 17124410
110 11629904 RETAINER RING, E-TYPE 4300031
120 11631551 SPRING, SHOULDER SCREW 4001166
130 11622456 SOCKET JOINT 17033150
140 11632177 HEAT SHIELD 17142660
150 11631551 SPRING, SHOULDER SCREW 4001166
160 11622445 Ball Joint 17033160
170 11631756 SPRING, RETAINING ROD 4000059
180 11631984 NUT PLATE, MOLY ELS 17189140
190 11634806 SCREW, ARC CHAMBER MOUNT 17127640
AMAT 9500-XR
Item Plansee No. Description OEM No
10 11370783 RETAINER, FRONT PLATE 002098908 
20 11560962 FRONT PLATE HALF 002084219 
30 11372078 LINER, SIDE 002098917 
40 11630691 LINER, BASE 002098916 
50 11381962 LINER,END,ANTI-CATHODE 002080181 
60 235781 ANTICATHODE 002081482 
70 11631734 STRAP, LINK, ANTICATHODE 002084898 
80 302705 SUPPORT BAR, ANTI-CATHODE 002080070 
90 11630704 ARC CHAMBER BERNAS 002081224 
100 11630713 SHIELD, INSULATOR 002085362 
110 11630708 INSULATOR W/HELICOIL 002097557 
120 11370375 SUPPORT, ARC CHAMBER, LOWER 002098900 
130 11381958 SLEEVE, OVEN NOZZLE 002081226 
140 11631660 PLUG, ARC CHAMBER, SDS 002085074 
150 11370373 SUPPORT, ARC CHAMBER, UPPER 002098899 
160 11629075 E-CLIP TO SUIT M4 SHFT SS 069090188 
170 11630771 COMPRESSION SPRING 378090110
180 11631169 SST WASHER, FLAT, M4 388090021
190 11630706 PIN, RETAINING 002096040 
200 11630794 STRAP, ION SOURCE 002098902 
210 11229481 CLAMP, FILAMENT, L/H 002081227 
220 11630716 THUMBSCREW, M4 002098911 
230 11630710 SOCKET HEAD CAP SCREW, M4X.7 X 16MM, MOD 002098581 
240 11381258 COLLET,FILAMENT CLAMP 002098580 
250 11229484 CLAMP, FILAMENT, R/H 004094018 
260 11370787 REFLECTOR, FILAMENT 002098914 
270 286213 FILAMENT, ARC, CHAM, DIA 2.4 002082135 
280 11381964 LINER, END, FILAMENT 002080180 
290 11631483 FRONT PLATE, HALF, TUNGSTEN 002084201 
AMAT VIISTA MEDIUM CURRENT
Item Plansee No. Description OEM No
10 11628295 SHCS, 6-32, .375LG, SST E47000017
20 11635588 CLAMP ARM, PH1 E17302120
30 11506845 CLAMP FILAMENT VER.2 IHC E17292540
40 11821596 FILAMENT, PH1, W E17297920
50 11371686 SHCS, 4-40, .460LG, MO E17295210
60 11615457 CATHODE CLAMP, VHC E17331970
70 11431983 CATHODE, STD, OP, HC E17295630
80 11371946 End Cap, IHC Source E17220310
90 11371947 Plate, Side, IHC Arc Chamber E17220340
100 11371948 SOURCE FRONT PLATE, VMC E17220370
110 11372072 Plate, End, Rep E17304690
120 11372063 REPELLER, HC E17289910
130 11506848 REPELLER CLAMP, HC E17292550
140 11635587 MC CLAMP ARM, IHC E17302110
150 11628304 SST SHCS .625LG E47000010
160 11635458 STRAP, FILAMENT CLAMP, LEFT, PH2 E17284470
170 11635459 STRAP, FILAMENT CLAMP, RIGHT, PH2 E17284400
180 11382728 STRAP CATHODE VER.2 IHC E17316430
190 11381782 INSULATOR, DUAL MOUNT, HC E17296280
200 11370757 NUTPLATE, BARCLAMP, HC/MC E17292510
210 11371690 NUT, 4-40, MO E17291350
220 11371952 Plate, Base, IHC Arc Chamber E17288230
230 11602581 GRAPHITE INSERT E17121520
240 11502261 GAS TUBE, IHC, SOURCE E17286660
250 11636660 CLAMP, CATHODE STRAP, IHC E17296360
260 11565838 Insulator, Base Feedthru (EG:25317) E17296000
300 11635739 BASE PLATE, A/C, PH2, NV, ASSY PLANSEE DESIGN
VARIAN E220/E500
Item Plansee No. Description OEM No
10 11631006 END PLATE, FILAMENT E17063160
20 11381617 NEW INNER INSULATOR E17168272
30 11632244 Shield,End Plate Top E17037064
40 11373039 Screw, Filament E17037001
50 11372504 Bernas Filament 50.052/001/ E17036990
60 11371928 W PLATE, TOP, ARC CHAMBER, SOURCE E17014691
70 11631004 REFLECTOR SCREW E17066330
80 11632243 SHIELD, END PLATE, BOTTOM, W E17037065
90 11371919 Arc Chamber Bottom End Cap E17063170
100 11371920 BERNAS ARC CHAMBER SIDE PLATE E17036921
110 11371940 Plate, Bottom, Blankoff Dualvap E17063191
120 11632174 RETAINING ROD E17143760
130 11629905 COMPRESSION SPRING E40000001
140 11629904 RETAINER RING, E-TYPE E43000005
150 11632175 RETAINING ROD CLAMP BASE E17143770
160 11632103 SOURCE, FILAMENT FEED E17014840
170 11106833 TA Tube, Gas, Dualvap E17014832
180 11663276 Spring, Filament, LH E17121431
190 11663277 Spring, Filament, RH E17121430
200 11631966 CLAMP, FILAMENT, SPRING E17036950
210 11630859 INSULATOR W/HELICOIL E17037010
220 11371648 Clamp,Filament Bernas E17036930
230 11632320 NEW OUTER INSULATOR (PHASE 3) E17168280
240 11371937 Plate Bottom Arc Chamber E17063190

We supply ion implanter source components and spare parts of Tungsten,Molybdenum,Titanium and stainless steel in OEM quality.

Please provide us OEM NUMBER or your drawings, We will work out quotation to you soon.

 

Our product range for ion implant systems includes various machined and formed parts made of Mo, TZM, W, WL, Ta, Graphite, Ceramic and Steel. We support all common ion implant systems: Varian semiconductor, Axcelis Technologies, Applied Materials, Nissan Ion Equipment and SEN Corporation.

 

Electron Beam Gun/Emitter Assembly and its spares, consumables and accessories  

Our company offers OEM quality Electron Beam Gun for full range of Electron Beam Evaporators in all Kind of Deposition.

We have electron beam gun replacement parts for your Multiple and Single Pocket and High Performance Emitters.

We manufacture filaments, crucibles, feed thrus,electromagnetic coil, gun parts, insulators,and all metal parts for all popular electron beam systems including: 

Temescal, Telemark,ULVAC,Thermionics,Satisloh, MeiVac, Sloan, and Leybold.

Electron Beam Gun Consumables
Temescal, p/n: 0916-8142-0, LH Cathode Block
Temescal, p/n: 0916-8152-0, RH Cathode Block
Temescal, p/n: 0916-8172-0, LH Beam Former
Temescal, p/n: 0916-8182-0, RH Beam Former
Temescal, p/n: 0916-8162-0, Filament Clamp
Temescal, p/n: 0916-8192-0, Anode
Temescal, p/n: 0916-8212-0, Anode Mounting Bracket
Temescal, p/n: 0916-8243-1, LH filament Bus Bar
Temescal, p/n: 0916-8243-2, RH filament Bus Bar
Temescal, p/n: 0916-8202-0, Emitter Support Bar
Temescal, p/n: 0916-8232-0, Emitter Mounting Bar
Temescal, p/n: 0916-8222-0, Emitter Mounting Bracket
Temescal, p/n: 0916-8310-0,Filament

 

Telemark, p/n: 273-0003-1, Anode Plate
Telemark, p/n: 273-0004-2, Beam Fomer
Telemark, p/n: 273-0019-1, U-Bracket
Telemark, p/n: 273-0017-1, Mounting Bracket
Telemark, p/n: 273-0031-1, Cathode Block,Left
Telemark, p/n: 273-0032-1, Cathode Block,Right
Telemark, p/n: 273-0033-1, Filament Clamp
Telemark, p/n: 273-0001-1, Filament 7.5 Turns
Telemark, p/n: 273-0010-1, Insulator,HV
Telemark, p/n: 273-0006-1, Insulator,Collar
Telemark, p/n: 273-0005-1, Insulator,Collar
Telemark, p/n: 273-0011-1, HV Shield
Telemark, p/n: 273-0035-1, Emitter Bus Bar,Left
Telemark, p/n: 273-0036-1, Emitter Bus Bar,Right
Telemark, p/n: 273-0018-1, Emitter Support Bracket

 

 

Email: 13917175219@139.com

Attn: Mr.Wang Chen

HP: +86 13917175219

Shanghai Techinital Materials Co.,Ltd.

Web: www.techinital.cn

17133410

ARC SLIT

W

17127640

SHOULDER SCREW

MO

17121740(R2)

REPELLER

W

17121770

REPELLER SCREW

MO

17133400(R1)

ARC CHAMBER

W

4001167

SPACER, RETAINING ROD

AL

4001166

RETAINING ROD SPRING

INCONEL

17188230

SHOULDER SCREW, INSULATOR

AL

17033150

BALL, JOINT

GRAPHITE

17033160

SKT, JOINT

GRAPHITE

17033140

COMPRESSION SPRING

INCONEL

17174120

SOURCE HEAD

AL

17102580

SOURCE HEAD BATTOM PLATE

AL

17032980

WATER, FEEDTHRU

STS

17002200

FEEDTHRU SCREW

AL

17033020

FILAMENT FEEDTHRU, NEG

BRASS

17033010

FEEDTHRU CONNECTOR

PEEK

17033021

FILAMENT FEEDTHRU, POS

BRASS

17036660

SOURCE BODY HANDLE

BAKELITE

17127840

FEEDTHRU, SPACER

BAKELITE

17127830

INSULATOR, FILAMENT, FEEDTHRU

VESPEL

17133300

FILAMENT FEED STRAP

AG

17335310

CLAMP FILAMENT

TZM

17187870

CLAMP, FILAMENT, INSULATOR

AL203

17121950(R2)

FILAMENT

W

17287860

CATHODE MOUNT PLATE

MO

17142890(R1)

CATHODE

W

17121930

CATHODE, REPELLER

W

 

Spare Parts for Novellus System C1,C2  
item P/N Description OEM
1 97003 HH,Screw,Spindle,Top,8-32x.89,1.02 OAL,Nickel 15-00399-04
2 97010 #10 Flat Washer with Flat,Nickel 15-00386-00
3 97037 Clamp,Aluminum 15-00654-00
4 97041 #8 Flat Washer,Nickel 15-00721-00
5 97043 HH,Screw,Fork,10-32x.60,Nickel 15-00698-00 rev C
6 97044 Wafer,Pick,Alumina 15-00699-01 rev F
7 97058 Retainer,Fork,Sequel,Inconel 17-101596-00
8 97060 Plate,Fork Retainer,Bottom,Aluminum 15-00700-00
9 97061 Fork,Top Plate A,Anti-Deflect,SEQ 15-101482-00
10 97062 Fork,Top Plate B,Anti-Deflect,SEQ 15-101482-01
11 97063 Fork,Top Plate C,Anti-Deflect,SEQ 15-101482-02
12 97068 Cup,Screw Cover,Aluminum 15-00951-00
13 97108 Fork,Top Plate A,Anti-Deflect,SEQ 15-277464-00
14 97060B Fork,Bottom Plate 15-325835-00
15 97060C Plate,Fork Retainer,Top,150mm 15-00703-00
16 97109 Screw,8-32x.82,Nickel 15-376399-00
17 97110 Hex Nut,8-32,Nickel 19-380482-00
18 97111 #8 Belleville Washer 19-380481-0
19 97001 HH Screw,Spindle,Top,8-32x.36,Nickel 15-00399-03
20 97003 HH Screw,Spindle,Top,8-32x.89,1.02 OAL,Nickel 15-00399-04
21 97022 Spindle Shaft,SST 15-00410-00
22 97036 Clamp Centering Ring,Aluminum 　
23 97041 #8 Washer,Nickel 15-00721-00
24 97065 Sleeve,TC,Ceramic 15-00680-00
25 97066 Tube,TC,Ceramic 15-00567-00
26 97067 Clamp,Flat 15-00729-00
27 97069 Ring,Heater Hub,Ceramic 15-00483-00
28 97070 Bushing,Keyed,Ceramic 15-00484-00
29 97071 Bushing,Keyed,Ceramic 15-00731-00
30 97035A Shaft Flange,Keyed,8-32x.328 Inconel Helicoils 15-032631-00
31 97006 Cable Assembly 15-00398-03
32 97019 Flat Washer,1/4-20,Nckel 15-00372-00
33 97025 Nex Nut,1/4-28,Nickel 15-00371-00
34 97041 #8 Washer Nickel 15-00721-00
35 97043 HH,Screw,Fork,10-32x.60,Nickel 15-00698-00 rev C
36 97045 Cup,Screw Cover 15-108174-00
37 97046 Cap Screw,1/4-20x.25,Nickel 15-119059-00
38 97047 Feed Thru Assembly 02-111903-00
39 97049 Cap Screw,1/4-20x.50LG,Nickel 15-114331-00
40 97050 Strap,RF 17-103987-00
41 97050A Strap,RF,.032 Thick 17-103987-00 Modified
42 97051 Clamp,Strap Feed Thru 15-103913-02
43 97053 Cap,Feed Thru,Ceramic 15-107698-00
44 97055 Nut,Hex,8-32 20-00212-00
45 97072 Sleeve,Heater Lead 2.00",Alumina 15-00558-01
46 97073 Sleeve Heater Lead 2.75",Alumina 15-00558-02
47 8A067V O-ring,-017,Viton 　
48 97028B Electrical Cable Assembly 16-00098-00
49 97047A Feed Thru Assembly,Heater 27-10114-00
50 97047B Feed Thru Assembly,Heater 19-00056-00
51 97048A Clamp,RF Strap 15-108307-00
52 97127 Strap,Heater RF,C1/C2 17-00094-01
53 96960 150mm Shower Head 03-00215-00
54 97011 Stand Off 15-00043-02
55 97013 Guide,Nozzle Adjuster 15-00027-02
56 97015 Ceramic Hub 15-00475-00
57 97026 Aluminu Washer 15-00686-00
58 97054 Nut,Hex,1/2-20,SST 15-00229-00
59 97055 Nut,Hex,8-32,SST 20-00212-00
60 97056 Feed Thru,3/8 O-Seal,Aluminum 15-00685-00
61 97057 Hanger,Nozzle,1.50"(200mm) 15-00309-01
62 97079 Fitting,90,3/8" Tube 15-00830-00
63 82912V O-ring,-12,Viton 22-00344-00
64 8B072 Nut 3/8" F/T Ultra Torr TP PLT 22-00342-00
65 97057A Hanger,Nozzle,1.33"(150mm) 15-00309-00
66 97016 #10 Flat Washer,Nickel 15-00386-00
67 97019 Flat Washer,1/4-20,Nckel 15-00372-00
68 97083 Spindle Clamp,SST 15-052621-00
69 97084 Retainer,Tong,R-Lift,Aluminum 15-052620-00
70 97088 Hub,Upper Indexer,Aluminum 15-034847-00
71 97089 Hub,Lower,Indexer 15-034848
72 97090 Indexer,Wafer,Exclusion,200mm 15-00934-02
73 97090A Indexer,Wafer,Exclusion,150mm 15-00934-01
74 97091 Seal Retainer 15-034849-00
75 97092 Screw(Hex head Bolt),1/4-20x.90,Vented 15-00839-00
76 97095 Screw(Hex head Bolt),10-32x.75,Nickel 15-01104-00
77 97096 Shaft,Spindle,Ring Lift 15-00982-00
78 97097 Shaft,Ring Lift 15-01103-00
79 8A367 Knurled Thumb Nut 10-32,SST 　
80 97113A Gas Trench Cover 15-118061-00
81 97106 Pump Shield 16-137450-00
82 97001 HH Screw,Spindle,Top,8-32x.36,Nickel 15-00399-03
83 97040 HH Screw,Spindle,Top,8-32x.99,1.12 OAL,Nickel 15-00399-05
84 8A889 #8 Washer,Flat,.02-.04 Thick,dia.375 OD,Aluminum 20-00221-00
85 97100 Insert,Split,Outer C2 15-250022-00
86 97102 Liner,MESC Flange Insert 15-250025-00
87 97099C Insert,Mesc Flange,Modified For Liner 22-251953-00